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Compact small-diameter thin wafer transfer device
The "Sic Holder Transfer Machine" is a device for transferring wafers from a horizontal oxidation/diffusion furnace wafer boat to a process cassette. We will provide it within 3 months after order and 3 days for startup adjustment. Please feel free to contact us if you have any requests. *For more details, please download the PDF or contact us.
The Orifura alignment can be switched using a switch! A wafer transfer device that flips the even rows of wafers in the central part.
We would like to introduce our "Wafer Transfer Device." With two carrier handlers on the left and right, it enables high-speed transport of 1 to 6 carriers. The alignment of the orifice can be switched between upper and lower alignment using a switch. The device can invert wafers in even-numbered rows at the center, while inversion of odd-numbered rows is optional. 【Main Specifications】 ■ Target wafers: Dedicated machines for 4, 5, or 6 inches ■ Number of transfer carriers: 1 to 6 (customizable) ■ Orifice alignment: Switchable (upper alignment, lower alignment) ■ Transfer time: Within 9 minutes for 6 carriers ■ Device dimensions: 1600mm x 725mm x 1450mm (for 4-inch specification) ■ Device weight: 150kg ■ Power supply: AC100V, 15A *For more details, please refer to the PDF document or feel free to contact us.
